Reliability of Daikin Fluorinated Grease in Semiconductor Vacuum Equipment

In semiconductor manufacturing, vacuum equipment requires lubricants with exceptional stability. Daikin fluorinated grease, with its low volatility and high resistance to heat and chemicals, ensures reliable performance under extreme conditions.

1. Special Demands of Semiconductor Vacuum Equipment

• Ultra-low volatility to prevent contamination inside vacuum chambers.

• High-temperature and plasma resistance to withstand harsh processing environments.

• Durability for continuous long-term operation.

2. Limitations of Conventional Grease

• Evaporation in vacuum, leaving residues that reduce yield.

• Decomposition or oxidation under high temperatures.

• Unstable lubrication film leading to higher friction and wear.

3. Advantages of Daikin Fluorinated Grease

• Outstanding vacuum stability with minimal evaporation.

• Heat and chemical resistance suitable for semiconductor processes.

• Clean operation without residue, improving wafer yield.

• Extended service life reduces downtime and maintenance costs.

Conclusion

Daikin fluorinated grease offers unmatched reliability for semiconductor vacuum equipment, making it an essential lubricant for advanced semiconductor manufacturing.